发明名称 |
Improved CMP products |
摘要 |
Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives. |
申请公布号 |
AU754328(B2) |
申请公布日期 |
2002.11.14 |
申请号 |
AU20000070900 |
申请日期 |
2000.08.30 |
申请人 |
SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
AJAY K. GARG;BRAHMANANDAM V. TANIKELLA;WILLIAM R. DELANEY |
分类号 |
B24B57/02;B24B37/00;B24B37/04;B24B37/24;B24D3/00;B24D3/28;B24D3/34;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C09K3/14 |
主分类号 |
B24B57/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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