| 摘要 |
A substrate transfer robot is provided to minimize the damage of a substrate by using an enhanced vacuum pad structure capable of enclosing a periphery of a vacuum hole. A substrate transfer robot includes a catch plate(70) for loading stably a substrate(2) defined with a panel region and a non-panel region. The catch plate includes a plurality of vacuum holes and a vacuum pad. The plurality of vacuum holes(72) are formed on the catch plate corresponding to the non-panel region of the substrate. The vacuum pad(74) is used for enclosing a periphery of the vacuum hole. The vacuum pad is formed like a ring type structure. The substrate transfer robot further includes a guide pad for covering the catch plate along both sides.
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