| 摘要 |
The invention relates to an apparatus for inspecting a sample, said apparatus equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, an optical microscope to observe the sample through a microscope slide, a vacuum chamber that contains the microscope slide and at least the objective lens of the optical microscope, wherein a liquid is included between the objective lens of the microscope and the microscope slide, directly in between objective lens and slide. |
