发明名称 METHOD AND DEVICE FOR DETECTING POSITIONAL DISPLACEMENT OF LAYER OF MULTILAYER LAMINATE
摘要 PURPOSE: To obtain a method by which the positional deviation between layers in a multilayer body containing conductors can be detected by appropriately positioning a hole formed through the multilayered body for electrically connecting different layers to each other. CONSTITUTION: In a positional deviation detecting method, the relative deviation of layers constituting a multilayered laminated body 4 containing conductors is detected so as to position the multilayer laminated body serially formed to electrically connecting conductor planes to each other to a hole formed through the laminated body. Each layer has optically distinguishable patterns 15 and 16 at clearly defined positions, with the patterns 15 and 16 being partially matched to each other in the laminated body 4, and at least one inspection hole 14 is formed in the body 4. Therefore, the hole 14 intersects the patterns 15 and 16 in the body 4 and the cut edges of the patterns 15 and 16 are optically detected in the hole 14.
申请公布号 JPH0599616(A) 申请公布日期 1993.04.23
申请号 JP19920071666 申请日期 1992.03.27
申请人 KURAUSU SHIYUNAIDAA 发明人 KURAUSU SHIYUNAIDAA
分类号 G01B11/00;G01B11/24;G01R31/28;H01L21/66;H05K1/02;H05K3/00;H05K3/46 主分类号 G01B11/00
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