| 摘要 |
<p>PROBLEM TO BE SOLVED: To form a carbon nanofiber at a relatively low temperature. SOLUTION: Argon gas is fed, via a gas port 3 for plasma, into a vacuum tank 1 whose inside is evacuated. An alternating current is applied on a cathode 6 constituted with filaments from a power sourcing apparatus 8 for heating filaments via a transformer to heat the cathode 6. When a direct current is supplied effectively between the cathode 6 and the anode 10 from a power source 9 for plasma electrical discharge in this state, plasma 5 is generated in the space between both the electrodes 6, 10. And, particles which has been sublimated from a sublimate substance 13 by the radiant heat of the cathode 6 float in the plasma 5, and the carbon nanofiber grows on the surface of a substrate 16 by using the sublimate substance as the raw material.</p> |
