摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a ceramic element wherein electrical connection between one end face side and the other end face side of a ceramic layer is performed reliably via a through hole. <P>SOLUTION: After forming a green sheet 34 on the top face of a carrier film 32, the film 32 and the sheet 34 are heated within a heating furnace 36 to be contracted with heat before forming a through hole at the sheet 34. Thus, even when the film 32 and the sheet 34 are heated in a process after forming the through hole, the film 32 and the sheet 34 are hardly contracted in addition with heat. Consequently, the through hole is prevented from being deformed and the forming position of the through hole is prevented from being deviated. Thus, the electrical connection between one end face side and the other end face side of the ceramic layer is performed reliably via the through hole. <P>COPYRIGHT: (C)2005,JPO&NCIPI |