摘要 |
The invention relates to a process for producing vaporiser crucibles, in particular ceramic crucibles, preferably for electron-beam vapour-deposition units. The object of the invention is to increase the service life of the vaporiser crucibles and hence the performance capacity of a complete unit. For this purpose, the crucible must be treated during its manufacture in such a way that the mechanical strength of the crucible insert is preserved in the event of large and rapid temperature fluctuations. According to the invention, a lining of liquid refractory concrete is introduced between the crucible shell and the vaporiser crucible insert, the completed crucible is subsequently dried in air and then fired in several stages in the waiting furnace and left in the furnace until it is used. The firing of the crucible takes place under a periodic baking regime up to 1200 K, at each stage with a holding time of 40-60 hours. Crucibles treated in this way have a service life of 300-600 hours.
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