DRY ETCHING METHOD AND APPARATUS THEREOF,申请号KR19930011383-传众专利搜索

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发明名称	DRY ETCHING METHOD AND APPARATUS THEREOF
摘要
申请公布号	KR0126249(B1)	申请公布日期	1997.12.26
申请号	KR19930011383	申请日期	1993.06.22
申请人	MATSUSHITA DENKI SANKYO KK.	发明人	IMAI, SINICHI;TAMAKI, NORIHIKO
分类号	H01L21/311;(IPC1-7):H01L21/311	主分类号	H01L21/311
代理机构		代理人
主权项
地址

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