Dynamic strain sensor and method

摘要

A dynamic strain sensor includes a strain sensitive transistor and a light emitting diode coupled to the strain sensitive transistor. The dynamic strain sensor can include a piezoelectric layer incorporated into the structure of the strain sensitive transistor. The dynamic strain sensor can sense dynamic strain and can measure and monitor the dynamic strain wirelessly.

主权项

1. A dynamic strain sensor comprising:
a strain sensitive transistor, the strain sensitive transistor comprising:
a substrate;a gate metal electrode coupled to the substrate;a piezoelectric layer;a semiconductor layer, wherein the piezoelectric layer is positioned between the gate metal electrode and the semiconductor layer;a source metal electrode in direct contact with a first portion of the semiconductor layer and a first portion of the piezoelectric layer; anda drain metal electrode in direct contact with a second portion of the semiconductor layer and a second portion of the piezoelectric layer; an isolator layer located on a third portion of the semiconductor layer, a first portion of the source metal electrode and a first portion of the drain metal electrode; and a light emitting diode coupled to and in direct contact with the isolator layer and a portion of the drain metal electrode of the strain sensitive transistor.