| 摘要 |
The present invention relates to a cover opening and closing device with multiple arrangement units in a height direction. The cover opening and closing device suppresses adhesion of foreign substances to a substrate in a substrate accommodation container arranged in the arrangement unit. The cover opening and closing device has the arrangement units in the height direction, wherein the arrangement unit can arrange the substrate accommodation container including an air outlet on one side and a cover blocking the air outlet. The cover opening and closing device includes a cover opening and closing unit facing the cover of the substrate accommodation container arranged on the arrangement units, respectively. The cover opening and closing device on the arrangement unit in the at least upper part includes: a latch key driving when the cover is attached and detached, wherein the latch key is formed on the surface facing the cover; a suction port for sucking gas in a space between the cover opening and closing unit and the cover; a cover keeping unit adsorbing and keeping the cover; and a packing unit installed on the outer circumference than the latch key and the suction port. |
