| 摘要 |
PURPOSE:To detect a deviation of an optical axis of a laser beam with high accuracy by detecting a feeble part around the laser beam. CONSTITUTION:The intensity around the laser beam 1 is reflected in the horizontal direction by a reflection mirror 13 and passed through a hole 14 provided to a laser light absorber 32, by which is part is taken out and the beam suitable for a photodetection area of a laser light intensity detector 15 is taken out. Signals detected by two couples of laser light intensity detectors 15 to meet at right angles provided in opposition output differently by the deviation of the optical axis of the laser beam, so the deviation of the optical axis can be detected. A sensor with high sensitivity capable of a high-speed response such as a thermocouple or a foil film laser sensor, etc., is used for the laser light intensity detector 15. The signal of the laser light intensity detector 15 displays the quantity of deviation of the optical axis of the laser light on a display device such as a meter, etc. |
