| 摘要 |
An article that includes a substrate and an amorphous, covalently-bonded layer on the surface of the substrate. The substrate may be a crystalline ceramic and/or may have a surface with a first surface roughness (Ra) of at least 100 angstroms, and the amorphous, covalently-bonded layer has a second surface roughness (Ra) of up to 15 angstroms. The substrate may have a dimension of at least 50 mm, and the amorphous, covalently-bonded layer may have a thickness of at least five micrometers. A method of making an article is also disclosed. The method includes forming an amorphous, covalently-bonded layer on the surface of the substrate by plasma deposition and, in some embodiments, polishing the amorphous, covalently-bonded layer to a second surface roughness (Ra) of up to 15 angstroms. The amorphous, covalently-bonded layer in the article and method includes silicon, oxygen, carbon, and hydrogen atoms. |
