| 摘要 |
PURPOSE: An excimer lamp is provided to suppress the deterioration of a discharge vessel and to prevent a vacuum ultraviolet ray from being irradiated to an inner side. CONSTITUTION: An excimer lamp(1) includes a discharge vessel(2), and a pair of electrodes(5,6). The discharge vessel is made of the quartz glass of a dual tube structure in which an inner tube(4) and an outer tube(3) are arranged to a coaxial direction. The pair of electrodes are installed while interposing the quartz glass. A xenon gas is sealed in a discharge space. The excimer discharge is generated in the discharge space of the discharge vessel. The inner tube is made of the melting quartz glass. The outer pipe is made of the synthetic quartz glass.
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