| 主权项 |
1. An actinic ray-sensitive or radiation-sensitive resin composition comprising: a resin (P) containing a repeating unit represented by the following Formula (A) and containing at least two of a repeating unit represented by the following Formula (B), a repeating unit represented by the following Formula (C), a repeating unit represented by the following Formula (D) and a repeating unit represented by the following Formula (E): wherein in Formula (A), R41 represents a hydrogen atom or an alkyl group, R41, and M21 or Ar may be bound with each other to form a ring, and in that case, R41 represents an alkylene group; R31 represents a hydrogen atom or an alkyl group; M21 represents a single bond or a divalent linking gorup, and in the case of being bound with R41 to form a ring, represents a trivalent linking group; and Ar represents a divalent aromatic ring group, and in the case of being bound with R41 to form a ring, represents a trivalent aromatic ring group: wherein in Formula (B), R51 represents a hydrogen atom or an alkyl group; each of R21 to R23 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group or a heterocyclic group, and each of at least two of R21 to R23 independently represents an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group or a heterocyclic group; at least two of R21 to R23 may be bound with each other to form a ring, provided that at least one of R21 to R23, and M11 or Q11 are not bound to form a ring; R32 represents a hydrogen atom or an alkyl group; R42 represents a hydrogen atom or an alkyl group, R42, and M22 or Ar2 may be bound with each other to form a ring, and in that case, R42 represents an alkylene group; M22 represents a single bond or a divalent linking group, and in the case of being bound with R42 to form a ring, represents a trivalent linking group; Ar2 represents a (n3+1)-valent aromatic ring group, and in the case of being bound with R42 to form a ring, represents a (n3+2)-valent aromatic ring group; M11 represents a single bond or a divalent linking group; Q11 represents an alkyl group, a cycloalkyl group, an aryl group or a heterocyclic group; when M11 is a divalent linking group, Q11 may be bound via a single bond or a separate linking group to M11 to form a ring; n1 represents an integer of 1 or more; and n3 represents an integer of 1 or more: wherein in Formula (C), R52 represents a hydrogen atom or an alkyl group; R33 represents a hydrogen atom or an alkyl group; R43 represents a hydrogen atom or an alkyl group, R43, and M23 or Ar3 may be bound with each other to form a ring, and in that case, R43 represents an alkylene group; M23 represents a single bond or a divalent linking gorup, and in the case of being bound with R43 to form a ring, represents a trivalent linking group; Ar3 represents a (n4+1)-valent aromatic ring group, and in the case of being bound with R43 to form a ring, represents a (n4+2)-valent aromatic ring group; M12represents a single bond or a divalent linking group; Q12 represents an alkyl group, a cycloalkyl group, an aryl group or a heterocyclic group; when M12 is a divalent linking group, Q12 may be bound via a single bond or a separate linking group to M12 to form a ring; n2 represents an integer of 0 or more; and n4 represents an integer of 1 or more: wherein in Formula (D), R53 represents a hydrogen atom or an alkyl group; each of R131 and R132 independently represents an alkyl group, a cycloalkyl group, an aryl group, an aralkyl group or a heterocyclic group, and each of R131 and R132 may be bound with each other to form a ring; R34 represents a hydrogen atom or an alkyl group; R44 represents a hydrogen atom or an alkyl group, R44, and M24 or Ar4 may be bound with each other to form a ring, and in that case, R44 represents an alkylene group; M24 represents a single bond or a divalent linking group, and in the case of being bound with R44 to form a ring, represents a trivalent linking group; Ar4 represents a (n5+1)-valent aromatic ring group, and in the case of being bound with R44 to form a ring, represents a (n5+2)-valent aromatic ring group; M13 represents a single bond or a divalent linking group; Q13 represents an alkyl group, a cycloalkyl group, an aryl group or a heterocyclic group; when M13 is a divalent linking group, Q13 may be bound via a single bond or a separate linking group to M13 to form a ring; and n5 represents an integer of 1 or more: wherein in Formula (E), R54 represents a hydrogen atom or an alkyl group; each of R61 to R63 independently represents an organic group in which an atom bound to C in —C(R61R62R63) is a carbon atom, and at least two of R61, R62 and R63 may be bound with each other to form a ring; R35 represents a hydrogen atom or an alkyl group; R45 represents a hydrogen atom or an alkyl group, R45, and M25 or Ar5 may be bound with each other to form a ring, and in that case, R45 represents an alkylene group; M25 represents a single bond or a divalent linking group, and in the case of being bound with R45 to form a ring, represents a trivalent linking group; Ar5 represents a (n6+1)-valent aromatic ring group, and in the case of being bound with R45 to form a ring, represents a (n6+2)-valent aromatic ring group; M14 represents a single bond or a divalent linking group; Q14 represents an alkyl group, a cycloalkyl group, an aryl group or a heterocyclic group; and n6 represents an integer of 1 or more, and wherein the resin (P) contains the repeating unit represented by Formula (A), the repeating unit represented by Formula (B) and the repeating unit represented by Formula (E). |
