Inertia sensor

摘要

This invention is directed to provision of high-performance inertial sensor that can sustain SNR even in an environment where vibration disturbance exists. A vibration type inertial sensor comprises: two deadweights (2, 3); means (C1, C2, C3, C4, +vd, −vd) for displacing the two dead weights in the anti-phase; two sets of electrodes (C5, C6, C7, C8) for detecting, as capacitance changes, the displacements of the two dead weights; and a C/V converting unit (53) for converting the capacitance changes of the electrodes to electric signals. In the vibration type inertial sensor, a set of electrodes (e.g., C5 and C8), which exhibit an increased electrostatic capacitance therebetween in the case where the two dead weights (2, 3) are displaced in the anti-phase, are electrically connected to each other, and a set of electrodes (e.g., C6 and C7), which exhibit a reduced electrostatic capacitance therebetween in the foregoing case, are electrically connected to each other, and further these sets of electrodes are connected to the C/V converting unit (53).

主权项

1. A vibration type inertial sensor comprising:
two dead weights; two sets of driving electrodes applying driving signals to the two dead weights, the signals for displacing the two dead weights in anti-phase with each other along a first direction; two sets of first electrodes detecting displacements of the respective two dead weights as electrostatic capacitance changes; and a first C/V converting unit converting the capacitance changes of the first electrodes into electrical signals, wherein
the first electrodes in a set whose electrostatic capacitance changes in a third direction when the two dead weights are displaced in anti-phase in the first direction are electrically connected with each other, the first electrodes of the other set whose electrostatic capacitance changes in a fourth direction opposite to the third direction when the two dead weights are displaced in anti-phase in the first direction are electrically connected with each other, and the respective sets of the first electrodes are connected with the first C/V converting unit.