| 摘要 |
This angular speed sensor has: a first substrate (20) having a first surface (20a) and a second surface (20b) on the opposite side from the first surface; a vibrating body (22) formed on the first substrate, the vibrating body having drive segments (24, 25, 114) that vibrate in the planar direction of the first substrate; a second substrate (50) arranged on the first surface side of the first substrate; first drive segment control electrodes (34a, 35a) formed in sections on the second substrate side; first drive segment auxiliary electrodes (52, 53) that are formed on the second substrate in sections facing areas in which the drive segments are displaceable, with capacitance (CV1, CV2) being constituted between these electrodes and the first drive segment control electrodes; and first drive segment control circuits (100a, 100b) that apply voltage to the first drive segment auxiliary electrodes. On the basis of the capacitance between the first drive segment control electrodes and the first drive segment auxiliary electrodes, the first drive segment control circuits adjust the voltage applied to the first drive segment auxiliary electrodes, in such a way that the distance between the first drive segment control electrodes and the first drive segment auxiliary electrodes is constant. |
