发明名称 イオンを集束および蓄積する装置、および圧力領域を分離する装置
摘要 <p>The invention relates to an apparatus (1301) for focusing and for storage of ions and to an apparatus for separation of a first pressure area from a second pressure area, in particular for an analysis apparatus (1400) for ions. The invention also relates to a particle beam device having at least one of the abovementioned apparatuses. The invention has a container (1201) for holding ions. Furthermore, at least one multipole unit (1301) is provided. The multipole unit (1301) has a through-opening (1302) with a longitudinal axis (1307) as well as a multiplicity of electrodes, wherein a first set of the electrodes is at a first radial distance from the longitudinal axis (1307), and wherein a second set of the electrodes is in each case at a second radial distance from the longitudinal axis (1307). The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening (1321) with a radial extent. The opening (1321) has a longitudinal extent which is greater than the radial extent.</p>
申请公布号 JP5798326(B2) 申请公布日期 2015.10.21
申请号 JP20110015827 申请日期 2011.01.27
申请人 发明人
分类号 H01J49/06;G01N27/62;H01J49/42 主分类号 H01J49/06
代理机构 代理人
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