| 摘要 |
A hard coating film is efficiently etched by a krypton ion beam of comparatively large mass, and then it is slowly etched by an argon ion beam of small mass. As a result, a coating film removing operation can be performed in a short time with suppressing an influence of the coating film removal on a tool base material (changes in shape and dimension) to the minimum. Since both krypton and argon are an inert gas, even upon the surface of the tool base material being exposed, the surface weakness by chemical erosion can be completely prevented. As a result, even when a hard coating film coated working tool is reproduced by re-coating the tool base material with the hard coating film, the hard coating film is coated by excellent adhesion strength. |
