发明名称 計測装置及び露光装置
摘要 <p>An apparatus includes a system configured to split a light emitted from a light source into reference light and subject light, cause the subject light to enter into an object, and combine the subject light reflected by the object with the reference light, a detection unit configured to detect coherent light between the combined subject and reference lights, an element, provided within a light path of the reference light or the subject light, configured to change a path length difference between the reference light and the subject light and a relative position between the reference light and the subject light in a light receiving surface of the detection unit, and a position-variable mechanism configured to cause a position of the optical element to be changeable, wherein, by changing a position of the element, the optical path length difference and the relative position are independently adjusted.</p>
申请公布号 JP5787483(B2) 申请公布日期 2015.09.30
申请号 JP20100007612 申请日期 2010.01.16
申请人 发明人
分类号 G01B11/00 主分类号 G01B11/00
代理机构 代理人
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