High density capacitor array patterns

摘要

A thin-film device system includes a substrate and a plurality of pillars. The plurality of pillars project from a surface of the substrate. Each of the plurality of pillars have a perimeter that includes at least four protrusions that define at least four recessed regions between the at least four protrusions. Each of the at least four recessed regions of each of the plurality of pillars receives one protrusion from an adjacent one of the plurality of pillars. A thin-film device is fabricated over the plurality of pillars.

主权项

1. A method comprising:
masking a substrate with a masking pattern that includes a plurality of masked regions, each of the masked regions having a perimeter that includes N protrusions that define N recessed regions between the N protrusions, wherein each of the N recessed regions of each of the plurality of masked regions receives one protrusion from an adjacent one of the plurality of masked regions, wherein each of the N protrusions of each of the plurality of masked regions includes additional protrusions, wherein the N protrusions and the additional protrusions define a fractal-like pattern, and wherein N is an integer greater than two; and etching the substrate to define a plurality of pillars that project from a surface of the substrate, each of the plurality of pillars having the perimeter.