SENSOR ELEMENT AND PRESSURE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a technology for improving the vibration characteristics of a vibrator in a resonance type sensor, and improving the detecting accuracy. ! SOLUTION: A sensor element 10 includes a vibrator 100 whose resonance frequency changes in accordance with an applied external force. The vibrator 100 includes: a main body vibration part 110; and an electrode part 150. The main body vibration part 110 has two parallel beam parts 111. The electrode part 150 includes: a movable electrode 120; an inside fixed electrode 130; and an outside fixed electrode 140. The inside fixed electrode 130 and the outside fixed electrode 140 are arranged at both sides of the movable electrode 120. The movable electrode 120 is connected to a beam part 111 of the main body vibration part 110, and configured so as to be displaced in accordance with an electrostatic force between both side electrodes 130 and 140 to cause the flexural vibration of each beam part 11. The movable electrode 120 is subjected to f