PORTABLE DEVICE FOR CALIBRATING MASS FLOW CONTROLLER

摘要

The present invention relates to a device for calibrating a mass flow controller that is connected to the mass flow controller to supply air of constant flow rate, and then evaluate and calibrate an error in performance of the mass flow controller. The device includes: a compressor; a compressed air stabilizer for adjusting temperature and pressure of air and eliminating impurities; a gas flow calibrator for supplying a constant flow rate to a mass flow controller and inspecting an error of the mass flow controller; a pressure control valve for controlling the pressure of the air supplied to the gas flow calibrator; and a control unit for controlling temperature, pressure and flow rate of the air and calibrating the mass flow controller according to the error inspected by the gas flow calibrator.