| 摘要 |
PROBLEM TO BE SOLVED: To provide aminosilane precursors for accumulating a silicon-containing film, and a method of accumulating the silicon-containing film from these aminosilane precursors.SOLUTION: There is provided an aminosilane precursor for accumulating a silicon-containing film having the formula (I): (RRN)SiR(I), where substituents Rand Rare each independently selected from a C1 to 20 alkyl group and a C6 to 30 aryl group, at least one of substituents Rand Rcontains an electron-withdrawing substituent selected from F, Cl, Br, I, CN, NO, PO(OR), OR, RCOO, SO, SOand SOR, and Ris selected from H, a C1 to 20 alkyl group or a C6 to 12 aryl group, and n is the number in a range of 1 to 4. |
