SILVER REFLECTORS FOR SEMICONDUCTOR PROCESSING CHAMBERS
摘要
A silver reflector for reflecting radiation from a lamp in a semiconductor processing chamber is disclosed. The reflector may be a sleeve to be disposed in a lightpipe or part of a lamphead. The silver may be in the form of a coating on the sleeve or the lamphead.
申请公布号
EP2257973(B1)
申请公布日期
2014.09.17
申请号
EP20090736547
申请日期
2009.02.20
申请人
APPLIED MATERIALS, INC.
发明人
RANISH, JOSEPH;CHURTON, KELLY;LINDSAY, MARK E.;PLESHA, MISCHA ANN;BERTA, SAGE
