发明名称 SURFACE PROCESSING APPARATUS AND METHOD
摘要 PROBLEM TO BE SOLVED: To solve the problem that though there is provided a technology to obtain both a machining rate and satisfactory surface roughness by grinding using a grinding stone and loose abrasive, a supplied loose abrasive cannot be satisfactorily held and the loose abrasive to be supplied cannot be used for enhancement of the machining rate and the satisfactory surface roughness because a conventional grinding stone is formed by firmly bonding abrasive grains and bond material.SOLUTION: A grinding stone comprises: fine grinding stone having high hardness and disposed by being stuck into a surface; and resin for maintaining the shape of the fine grinding stone in a state where the fine grinding stones are stuck.
申请公布号 JP2014128877(A) 申请公布日期 2014.07.10
申请号 JP20140040917 申请日期 2014.03.03
申请人 FEMUTEKKU:KK 发明人 SAKAI KOZO
分类号 B24B7/04;B24B37/00;B24B37/04;B24B57/02;H01L21/304 主分类号 B24B7/04
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