METHOD, APPARATUS AND SAMPLE FOR EVALUATING BONDED STRENGTH

摘要

A method for evaluating bonding strength, according to the present invention, includes a step for setting a micro-zone including a bonding boundary on a sample for evaluation; a step for forming a first groove having a predetermined depth around the micro-zone; a step for forming a second groove connected to the bonding boundary by processing the sides of the micro-zone; and a step for measuring a critical point where detachment of the micro-zone occurs by pressurizing the micro-zone.