SUBSTRATE PROCESSING DEVICE, METHOD OF OPERATING SUBSTRATE DEVICE, AND STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of detecting abnormality in a conveyance container for storing substrates and carrying them into a substrate processing device to avoid troubles due to the abnormality.SOLUTION: A substrate processing device includes: a load port into which a conveyance container is carried; a detection part for detecting a storage state of substrates in the conveyance container which is carried into the load port and from which a lid is removed; a processing part for processing the substrates taken out from the conveyance container which is carried into the load port; and a control part. The control part executes: a first step for detecting the storage state of the substrates in the conveyance container before the substrates are delivered to the processing part from the conveyance container which is carried into the load port; a second step for detecting the storage state of the substrates in the conveyance container before the lid is closed, after the substrates processed by the processing part are returned to the conveyance container; and a third step for determining whether or not the conveyance container has abnormality on the basis of the first step and the second step.