发明名称 Implant for performance enhancement of selected transistors in an integrated circuit
摘要 A first implant is performed into a substrate to form a well in which a plurality of transistors will be formed. Each transistor of a first subset of the plurality of transistors to be formed has a width that satisfies a predetermined width constraint and each transistor of a second subset has a width that does not satisfy the constraint. A second implant is performed at locations in the well in which transistors of the first subset will be formed and not at locations in the well in which transistors of the second subset will be formed. The transistors are formed, wherein a channel region of each transistor of the first subset is formed in a portion of the substrate which received the second implant and a channel region of each transistor of the second subset is formed in a portion of the substrate which did not receive the second implant.
申请公布号 US8709883(B2) 申请公布日期 2014.04.29
申请号 US201113213992 申请日期 2011.08.19
申请人 SHROFF MEHUL D.;JOHNSTONE WILLIAM F.;WEINTRAUB CHAD E.;FREESCALE SEMICONDUCTOR, INC. 发明人 SHROFF MEHUL D.;JOHNSTONE WILLIAM F.;WEINTRAUB CHAD E.
分类号 H01L21/00;H01L21/84 主分类号 H01L21/00
代理机构 代理人
主权项
地址