| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor free from getting damage on beam parts even when an excessive acceleration is applied with small 0 offset and cross-axis sensitivity capable of setting the sensitivity ratio in an X-axis direction and in a Y-axis direction to be substantially equal to each other.SOLUTION: The acceleration sensor includes: a support frame part 25; beam parts 26, 26' and 27, 27' of a width W; a first film 31 formed on the upper face of the support frame part 25; and a second film 32 formed over the first film 31. The first film 31 has a semicircular cut-off which has a radius within a range of W-3W from the center connection end between a beam part 26, 26', 27, 27' and the support frame part 25. |
