SLAB TYPE AMPLIFIER, LASER DEVICE EQUIPPED WITH SAME, AND EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE

摘要

Provided is a slab type amplifier which suppresses self-oscillation. The slab type amplifier into which a seed beam (45) emitted from at least one seed light source is input to amplify the seed beam comprises: a chamber (47) that is provided with a first through-hole (63) and a second through-hole (64) and in which a laser amplification medium is housed; a first window (54) provided so as to hermetically seal the first through-hole; a first window holder (50) for holding the first window; a second window (55) provided so as to hermetically seal the second through-hole; a second window holder (53) for holding the second window; a pair of planar electrodes (42, 43) arranged opposite each other at a prescribed interval (44) in the chamber; and an optical system (48, 51) arranged in the chamber. An amplified beam is generated when the seed beam is incident between the pair of planar electrodes after being transmitted through the first window and is then repeatedly reflected by the optical system. The slab type amplifier may include a first aperture plate (61) which is provided between the first window and the pair of planar electrodes with an opening having an area that is equal to or larger than the cross-sectional area of the seed beam and equal to or smaller than the area of the first window; and a second aperture plate (62) which is provided between the second window and the pair of planar electrodes with an opening having an area that is equal to or larger than the cross-sectional area of the amplified beam and equal to or smaller than the area of the second window.