发明名称 CURABLE COMPOSITION FOR IMPRINTS, PATTERN-FORMING METHOD AND PATTERN
摘要 Provide is a curable composition for imprints capable of keeping a good pattern and heat resistance. A curable composition for imprints comprising a polymerizable compound (Ax-1) having maleimide structure(s), or a compound (Ax-2) having a partial structure represented by formula (I) below. Formula (I)
申请公布号 US2014050900(A1) 申请公布日期 2014.02.20
申请号 US201314063739 申请日期 2013.10.25
申请人 FUJIFILM CORPORATION 发明人 KODAMA KUNIHIKO;GOTO YUICHIRO
分类号 G03F7/075;B29C59/16 主分类号 G03F7/075
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