| 摘要 |
The present invention relates to a separation system using a vacuum wall. The present invention is characterized by reducing processes which are processed by leveling a whole research facility and installing a negative pressure room, a vacuum wall, and a positive pressure wall or a positive pressure room, a vacuum wall, and a negative pressure wall in order. Therefore, the present invention can be blocked against contamination from the outside and the contamination caused by inner substances flowing outside. |
