发明名称 |
VACUUM TREATMENT APPARATUS |
摘要 |
To reduce pumping time of a vacuum treatment chamber served by a transport arrangement in a transport chamber the vacuum treatment chamber is split into a workpiece treatment compartment and a pumping compartment in mutual free flow communication and arranged opposite each other with respect to a movement path of the transport arrangement serving the vacuum treatment chamber. The pumping compartment allows a pumping port to have a flow cross-section area that is freely selectable independently from the geometry of the treatment compartment. |
申请公布号 |
KR20140003479(A) |
申请公布日期 |
2014.01.09 |
申请号 |
KR20137018750 |
申请日期 |
2011.12.27 |
申请人 |
OC OERLIKON BALZERS AG |
发明人 |
SCHOLTE VON MAST BART;RIETZLER WOLFGANG;LODDER ROGIER;BAZLEN ROLF;ROHRER DANIEL |
分类号 |
H01L21/67;H01L21/677 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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