摘要 |
<p>Cracks are prevented from being prevented on a single crystal substrate. The single crystal substrate (2) having contact areas (10a, 10b, 10c) at the outer surface of the top is loaded on a support board (1) while the crystal orientation of the single crystal substrate (2) is maintained. A linear contact surface of each contact pin (3a, 3b, 3c) is in contact with the contact areas (10a, 10b, 10c) of the outer surface of the single crystal substrate (2) loaded on the support board (1). The longitudinal direction of the contact surface of all contact pins (3a, 3b, 3c) is not parallel to the top and intersection lines (9a, 9b) of the cleavage surface of the single crystal substrate (2).</p> |