| 摘要 |
A position sensor includes: a stator including an excitation coil and a detection coil each formed in planar shape; and a mover placed to face the stator and provided with a plurality of regions having different magnetic permeability and being arranged periodically in a moving direction of the mover. The excitation coil includes a first excitation coil pattern and a second excitation coil pattern formed adjacent to the first excitation coil pattern. The detection coil includes a detection coil pattern placed between the first excitation coil pattern and the second excitation coil pattern in the moving direction of the mover. The second excitation coil pattern is wound to flow an excitation current in an opposite direction to the first excitation coil pattern.
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