发明名称 |
MAGNETIC FIELD GENERATOR, MAGNETRON CATHODE AND SPATTERING APPARATUS |
摘要 |
A magnetic field generator arranged behind a target and for generating a magnetic field on a front surface of the target based on magnetic force lines can include a ring-shaped outer magnetic body having a pole axis in a parallel direction (X-direction) with respect to the target surface, a center magnetic body arranged on an inner side of the outer magnetic body and having a pole axis in a parallel direction (X-direction) with the direction of the pole axis of the outer magnetic body, a yoke plate for supporting the outer magnetic body and the center magnetic body from behind, and a magnetic permeable plate for changing a magnetic field distribution of the front surface of the target. The magnetic permeable plate is arranged so as to be supported by the yoke plate from behind.
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申请公布号 |
US2013180851(A1) |
申请公布日期 |
2013.07.18 |
申请号 |
US201113698884 |
申请日期 |
2011.08.30 |
申请人 |
KONG WEI;LIN ZIJING;LI MING;XIE BIN;WANG HAIQIAN;JIANG YOUSONG;NAGAE EKISHU;UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA;SHINCRON CO., LTD. |
发明人 |
KONG WEI;LIN ZIJING;LI MING;XIE BIN;WANG HAIQIAN;JIANG YOUSONG;NAGAE EKISHU |
分类号 |
C23C14/35;H01F7/08;H01J25/50 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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