Capacitive pressure sensor has measuring and reference capacitors that are arranged in feedback path of charge amplifier and are alternatively connected with input and output of charge amplifier

摘要

The pressure sensor has a measuring capacitor (1) that is provided with a counter electrode. The measuring capacitor is coupled with a charge amplifier (2). The measuring capacitor and reference capacitor (3) are arranged in the feedback path of charge amplifier. The measuring and reference capacitors are alternatively connected with input and output of charge amplifier.