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发明名称
Force detection system in semi-conductor micro-mechanic structures
摘要
申请公布号
PL214048(B1)
申请公布日期
2013.06.28
申请号
PL20070381718
申请日期
2007.02.08
申请人
INSTYTUT TECHNOLOGII ELEKTRONOWEJ
发明人
GRABIEC PIOTR;LYSKO JAN M.;DUMANIA PIOTR;BUDZYNSKI TADEUSZ;SZMIGIEL DARIUSZ;GRZYWACKI MIROSLAW;SKWARA KARINA;DOBROWOLSKI RAFAL
分类号
H01L29/00;G01L9/00
主分类号
H01L29/00
代理机构
代理人
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地址
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