| 摘要 |
PURPOSE: A pad pattern repairing device of an organic light emitting device is provided to repair a short failure of a pad terminal due to a scratch by a laser cutting process and repair the disconnection of part using an air pressure chamber with laser deposition. CONSTITUTION: A laser oscillating unit(L) oscillates laser beams. A beam transmitting unit(210) changes the direction of the laser beam from the laser oscillating unit to transmit the laser beam to a pad pattern of the organic light emitting device. A beam size controller(220) changes the size of the laser beam. An image unit(230) photographs the image of an organic light emitting layer in real time. An autofocus unit(240) controls the focus of an object lens(250). [Reference numerals] (100) Atmospheric chamber; (121) Light radiation hole; (122) Raw material gas discharge part; (123) Rectified gas discharge part; (124) Optical window; (210) Beam transmitting unit; (220) Beam size controller; (230) Image unit; (240) Autofocus unit; (250) Object lens; (C) Clamp; (L) Laser oscillator; (S) Stage |
