,申请号JP20050290864-传众专利搜索

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发明名称
摘要
申请公布号	JP5093831(B2)	申请公布日期	2012.12.12
申请号	JP20050290864	申请日期	2005.10.04
申请人		发明人
分类号	H01L21/027;H01J37/147;H01J37/305	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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