LARGE SCALE PLASMA CHAMBER

摘要

PURPOSE: A plasma chamber having a large area is provided to obtain uniform plasma density and high energy efficiency by adopting an adaptive plasma source. CONSTITUTION: A large area plasma chamber(100) has an internal reaction space which is limited by an outer wall of a chamber(102). A susceptor(106) supporting a liquid crystal display panel(104) is arranged on the floor of the large area plasma chamber. The susceptor is connected to a bias power supply source for applying the bias power. A plurality of unit windows(121) is arranged on a top window area(120). A plurality of unit windows is respectively separated by a window frame(122). The unit windows serve as a vacuum seal between the large area plasma chamber and the outside. A window frame(122a) which contacts the outer wall of the chamber is made out of an insulating material in order to allow the window frame to float.