SUBSTRATE WITH THOUGH ELECTRODE AND METHOD FOR PRODUCING SAME

摘要

This method for producing a substrate with a though electrode comprises: a step wherein a recessed portion (21) or a through hole (21B) is formed in one of a silicon substrate (51) and a glass substrate (54); a step wherein a projected portion (52) is formed on the other substrate; a step wherein the silicon substrate (51) and the glass substrate (54) are combined together so that the projected portion (52) is inserted into the recessed portion (21) or the through hole (21B); and a step wherein the silicon substrate (51) and the glass substrate (54) are bonded with each other.