| 摘要 |
PURPOSE: A deposition material supply device and a deposition material supply method using the same are provided to prevent deposition material to be degraded by including evaporation material storage which stores material evaporated in a container. CONSTITUTION: A storing container(31) stores deposition material. A first heating unit(33) heats the deposition material saved in the storing container and evaporates the deposition material. A spraying unit(38) sprays the deposition material which is evaporated in the storing container toward a substrate(S). A middle line(36) interlinks an exhausting unit(32) of the storing container with the spraying unit. A spray blocking valve(37) is located at a connecting portion of the middle line and the spraying unit.
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