发明名称 Mask for crystallizing a semiconductor layer and method of crystallizing a semiconductor layer using the same
摘要 A mask for crystallizing a semiconductor layer includes a plurality of first main-slit portions, a plurality of second main-slit portions, upper slit portion and lower slit portion. The first main-slit portions extend along an inclined direction with respect to a first direction. The second main-slit portions are spaced apart from the first main-slit portions. The upper slit portion is disposed on the first main-slit portions along a second direction to be parallel to the first main-slit portions, and extends partway over the second main-slit portions to be longer than the first main-slit portions. The lower slit portion is disposed under the second main-slit portions along the second direction to be parallel to the second main-slit portions, and extends partway under the first main-slit portions to be longer than the second main-slit portions.
申请公布号 US8163444(B2) 申请公布日期 2012.04.24
申请号 US20090321985 申请日期 2009.01.27
申请人 PARK CHEOL-HO;SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK CHEOL-HO
分类号 G03F1/00;C30B25/12 主分类号 G03F1/00
代理机构 代理人
主权项
地址