| 摘要 |
PURPOSE: An optical interference cross-sectional image apparatus having an improved axial direction contrast and a reference reflector having a multi-surface for the same are provided to not to demand a large optical bands performance of other optical components of an optical interference cross-sectional image apparatus and a distributed compensation with respect to routes at each interference arm. CONSTITUTION: An optical interference cross-sectional image apparatus(300) having an improved axial direction contrast comprises a reference reflective mirror(330) and sample reflective mirror(340). Light emitted from a light source(310) is branched to the reference reflective mirror and sample reflective mirror, thereby irradiating. An interference cross-sectional image of the measurement object is obtained by using an interferential signal generated by a difference between the paths of light reflected from the measurement object through the sample reflective mirror and light reflected from the reference reflective mirror. The reference reflective mirror is a MULTI-surfaces reflective mirror comprising two or more reflective surfaces.
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