MICRO-ELECTROMECHANICAL SYSTEM

摘要

Micro-electromechanical system (MEMS) comprising a substrate or substrate parts, and a compliant first segment or segments within the substrate or substrate parts with a predefined positive stiffness, wherein the first segment or segments is or are statically balanced. This is embodied by applying a second segment or segments within the substrate or substrate parts that provide a balancing force to the first segment or segments so as to counteract at least in a predefined working range of the first segment or segments the said predefined positive stiffness.