FILLING OF A PRINTING CHAMBER AND A CHUCK THEREFORE

摘要

A chuck (100) for holding a substrate or master electrode in an ECPR process is provided. The chuck comprises an interaction surface (101) for holding a master electrode or a substrate; a buffer surface (102) circumferentially of the interaction surface (101). The interaction surface (101) and the buffer surface (102) extend in substantially the same plane. At least one electrolyte injection mouth (103) is arranged in the buffer surface (102) and adjacent the interaction surface (101). A method of operating a filling of an ECPR chamber is also disclosed.