METHOD OF PRODUCING GROUP 13 METAL NITRIDE CRYSTAL, GROUP 13 METAL NITRIDE CRYSTAL OBTAINED BY THE SAME, AND SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a group 13 metal nitride crystal for greatly improving a generation speed of a group 13 metal nitride crystal and for producing a high-quality crystal.

SOLUTION: The method of manufacturing a group 13 metal nitride crystal includes: a process of fabricating a solution by dissolving a raw material 100 in a solvent 101; and a process of growing a crystal of a group 13 metal nitride within the solution. In the manufacturing method, the solution includes a group 17 element, and pressure within a reaction vessel 102 is less than 1.0 atm in the crystal growth process.

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