HYDROGEN SENSOR AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A hydrogen sensor and a manufacturing method thereof are provided to enlarge the usage of hydrogen sensor by giving elasticity to the hydrogen sensor. CONSTITUTION: A manufacturing method of a hydrogen sensor is as follows. An elastic board(10) is prepared. Pd or a Pd alloy film(30) having Pd having-α phase is formed on the elastic board. The thin film is exposed to the hydrogen containing gas of the designated concentration to make the α-shape of the thin film into β-phase. The hydrogen containing gas exposure is stopped to convert β-shape of the thin film into α-shape. The elastic board has a Poisson's ratio of 0.3~0.7. The elastic board is made of natural rubber, synthetic rubber and Polymer.