发明名称 LIGHT IRRADIATION DEVICE AND LIGHT EXPOSURE METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a light irradiation device which allows efficient reacting of an object to exposure which reacts with light and also, can restrain environmental loading factors, as well as a light exposure method. <P>SOLUTION: This light irradiation device 1 comprises a first to a fourth LED423A to 423D which radiate first to fourth single wave light L1 to L4 of a monowavelength to an adhesive AD constituting an adhesive sheet S, and a halogen lamp 431 which emits a multiwave light L5 including a plurality of wavelengths and does not use mercury. In addition, the exposure to at least either one kind selected from among the first to the fourth monowave light L1 to L4 and the multiwave light L5 are both timed in the mutually coinciding manner. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011189313(A) 申请公布日期 2011.09.29
申请号 JP20100059093 申请日期 2010.03.16
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 B01J19/12;F21S2/00;F21Y101/00;F21Y101/02;H01L33/00 主分类号 B01J19/12
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